Method for Measuring Saturation magnetization of Magnetic Films and Multilayer Stacks

ABSTRACT

A ferromagnetic resonance (FMR) measurement method is disclosed wherein a magnetic film or stack of layers is patterned into elongated structures having a length along a long axis. A magnetic field (H) is applied in two different orientations with respect to the long axis (in-plane parallel and perpendicular to the long axis) or one orientation may be perpendicular-to-plane. In another embodiment, H is applied parallel to a first set of elongated structures with a long axis in the x-axis direction, and perpendicular to a second set of elongated structures with a long axis in the y-axis direction. From the difference in measured resonance frequency (Δfr) (for a fixed magnetic field and sweeping through a range of frequencies) or the difference in measured resonance field (ΔHr) (for a fixed microwave frequency and sweeping through a range of magnetic field amplitudes), magnetic saturation Ms is determined using formulas of demagnetizing factors.

RELATED PATENT APPLICATIONS

This application is related to Docket # HT16-012, Ser. No. 15/463,074,filing date Mar. 20, 2017; Docket # HT17-025, Ser. No. 15/875,004,filing date Jan. 19, 2018; and Docket # HT17-048, Ser. No. 16/056,783,filing date Aug. 7, 2018; which are assigned to a common assignee andare herein incorporated by reference in their entirety.

TECHNICAL FIELD

The present disclosure relates to a ferromagnetic resonance (FMR) methodfor measuring saturation magnetization (Ms) in magnetic films andmultilayer stacks that are patterned into elongated structures, such asparallel stripes, and in particular, to measuring FMR spectra of thepatterned structures on whole wafers along at least two differentorientations of the magnetic field with respect to the long axes of suchstructures and then calculating Ms from the difference in resonancefield, or from the difference in resonance frequency of the twomeasurements.

BACKGROUND

Magnetic thin films and multilayers play a key role in various types ofmagnetic storage devices such as a magnetic hard disk (HDD) drive,Magnetic Random Access Memory (MRAM), spin torque oscillator (STO), andmagnetic domain wall devices. In order to develop and optimize suchdevices, monitoring and characterization of magnetic thin film stacksare necessary. A variety of different magnetic characterizationtechniques must be used to determine all the essential magneticparameters such as crystalline anisotropy, surface or interfaceanisotropy, magnetization saturation (Ms), damping constant (α),gyromagnetic ratio (γ), inhomogeneous broadening, resistance x areaproduct (RA), and magnetoresistive ratio (MR).

Some of the aforementioned parameters (RA and MR) can be determined onindustry-sized wafers (having diameters of 6, 8, 12 inches or more) bynon-invasive transport measurements such as Current-in-Plane Tunneling(CIPT). The other magnetic parameters are usually determined by eitherFMR techniques (to derive anisotropy fields (Hk), gyromagnetic ratio γ,damping constant a, or inhomogeneous broadening (L₀), or by one or bothof Vibrating Sample Magnetometry (VSM) and Superconducting QuantumInterference Device (SQUID) magnetometry to determine Ms. However, thesetechniques typically require cutting wafer-sized magnetic films intosmall coupons thereby making such characterization tools destructive,impractical, and time and labor intensive, which adversely impacts cost.

In the prior art, a FMR measurement is generally performed with a methodthat involves probing the magnetic system (thin film, multilayer stack,or structured device) with a combination of microwave excitation and aquasi-static magnetic field. FMR data is obtained by either sweeping themagnetic field at a constant microwave frequency, or by sweeping thefrequency at a constant field. When the ferromagnetic resonancecondition is achieved, it may be detected by an enhanced absorption ofthe microwave (RF signal) by the ferromagnetic sample. Thus, resonance(FMR) conditions are defined with pairs of magnetic field (Hr) andmicrowave frequency values (fr) for each resonance condition. Asindicated earlier, FMR measurements that use pieces of wafers are notacceptable in an industrial environment because of cost. Furthermore, itis desirable to be able to obtain Ms data in addition to Hk, γ, α, andL₀ results using only one measurement method for increased efficiency.Therefore, an improved FMR measurement method is needed that enablesfully automated measurements on whole wafers, and is capable ofdetermining Ms values. The improved FMR measurement method should alsobe capable of obtaining the aforementioned data on patterned stacks offilms such as a magnetic tunnel junction (MTJ) stack.

SUMMARY

One objective of the present disclosure is to provide a FMR method fordetermining Ms in magnetic films including MTJ stacks of layers on awhole wafer.

A second objective of the present disclosure is to provide a FMR methodaccording to the first objective that has flexibility in applyingdifferent magnetic field orientations, and in the size of patterns usedfor the measurements.

These objectives are achieved according to one embodiment of the presentdisclosure when utilizing a FMR measurement system that is configuredaround a controller (computer) linked to an electrical probe station.The FMR measurement system may be based on an inductive technique asdescribed in related patent application Ser. Nos. 15/463,074, and15/875,004, or may employ one or more probes adjoined to a mountingplate that also holds a magnetic assembly comprised of one or moremagnetic field sources that is described in related patent applicationSer. Nos. 15/875,004 and 16/056,783. Thus, the FMR measurement of thepresent disclosure may be performed with a fully automated wafer levelFMR apparatus described in the related patent applications. The magneticassembly may be configured to apply a magnetic field“perpendicular-to-plane”, and one or more RF probes on the mountingplate may contact a plurality of predetermined locations on the magneticfilm so that multiple sites are measured consecutively orsimultaneously.

In another embodiment, the magnetic assembly comprises two magneticpoles that are positioned on either side of the RF probe (or 2 mmagnetic poles where a magnetic pole in each pair of magnetic poles isdisposed on each side of one of the “m” RF probes where m is an integer≥2) thereby providing an in-plane magnetic field to the magnetic film ateach predetermined test location during a FMR measurement. The magneticpoles are in proximity to the magnetic film but do not contact a topsurface thereof.

According to one embodiment that represents a RF transmission mode forperforming the FMR measurements, a RF input signal passes through asignal (S) pathway in the probe tip while a magnetic field is applied tothe magnetic structure contacted by the RF probe tip. When the RFcurrent excites the magnetic layers in the test structure, there is apower loss that is transmitted in a RF output signal through a signalpathway and detected by a RF diode. The RF diode may be linked to ananalog-to-digital converter (ADC), which transmits the data through anoptional data acquisition (DAQ) system to the controller. Thetransmitted RF power through the test structure is measured fordifferent applied RF (microwave) frequencies as a function of a fixedmagnetic field (H), or by sweeping with different values of H while afixed microwave frequency is applied.

In an alternative embodiment where FMR measurements are performed in areflectance mode, the components in the first embodiment are retainedexcept a directional coupler is inserted in the RF circuit so that onlyone S pathway in the RF probe tip is necessary since the RF inputsignals and RF output signals pass through the same S pathway to andfrom the directional coupler. The RF output signals are sent from thedirectional coupler to the RF diode and then to the ADC, DAQ system, andcontroller.

The FMR measurement method of the present disclosure also comprisespatterning the film stack into a plurality of stripes or other elongatedfeatures of known dimensions including length L, width w, and thicknesst on a wafer under test (WUT). Thereafter, FMR spectra are obtained byapplying a magnetic field (H) along two different orientations whilesweeping through a range of RF frequencies at the test locations, or bysweeping through different H at a fixed RF frequency. For example, afirst magnetic field is applied in the x-axis direction and a secondmagnetic field is applied in the y-axis direction when the stripepattern has a lengthwise direction along the x-axis and a widthwisedirection along the y-axis. Alternatively, the first magnetic field isapplied in the x-axis (or y-axis) direction, and the second magneticfield is applied in the z-axis (perpendicular-to-plane) direction.Moreover, a first set of stripes may have a lengthwise direction alongthe x-axis while a second set of stripes has a lengthwise directionalong the y-axis to avoid having to rotate the WUT or switch themagnetic assembly between the first and second applied fields. Ms iscalculated from the difference in resonance field or from the differencein resonance frequency between the two measurements, using the knownexpressions of demagnetizing factors Nx and Ny along the long and shortdimensions of the stripes, respectively, as described herein.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic drawing of a FMR measurement system that may beused to perform the FMR measurement method of the present disclosure ona wafer level.

FIG. 2 is a top-down view showing two sets of stripes with dimensions Land w on a wafer, and with a long axis parallel and transverse to theapplied in-plane magnetic field (H) according to a first embodiment ofthe present disclosure.

FIG. 3A and FIG. 3B are top-down views of a single set of stripes wherefirst in-plane (H₁) and second in-plane (H₂) magnetic fields,respectively, are applied parallel and perpendicular to the long axisdimension according to a second embodiment of the present disclosure.

FIG. 4A and FIG. 4B are top-down views of a single set of stripes wherefirst in-plane (H₁) and second perpendicular-to-plane (H₂) magneticfields, respectively, are applied with respect to the long axisdimension according to another embodiment of the present disclosure.

FIG. 5A-5C are plots showing the relationship between demagnetizingfactors Nx, Ny, Nz, respectively, for a magnetic stripe of 1 nmthickness and different widths (w) as a function of stripe length (L).

FIG. 6A-6C are plots showing the relationship between demagnetizingfactors Nx, Ny, Nz, respectively, for a magnetic stripe of 10 microns inlength, and with different widths (w) as a function of stripe thickness(t).

FIG. 7A is a plot showing FMR frequency vs. applied field for a magneticstripe of L˜10 microns, w˜100 nm, and t˜1 nm when the applied in-planefield (H) is parallel, or transverse to the stripes lengthwisedirection.

FIG. 7B is a plot showing the difference (solid line) between the FMRresonance fields for the two in-plane magnetic field configurations(ΔHr=Hrx−Hry) shown in FIG. 7A vs. applied field amplitude H, whereasthe dashed line shows the limit value of ΔHr for high magnetic fields.

FIG. 8 is a plot illustrating variations in ΔHr as a function of stripewidth for an in-plane magnetic field (H) of 40 kOe.

FIG. 9 is a plot of acquired data from a RF diode as a function ofvarious applied magnetic fields at different RF microwave frequenciesaccording to an embodiment of the present disclosure.

DETAILED DESCRIPTION

The present disclosure is a FMR measurement method of determiningmagnetization saturation (Ms) in a magnetic film or stack of layers thatis patterned into a least one elongated structure, such as a stripe, orset of elongated structures with a lengthwise direction along one of thex-axis and y-axis direction on a wafer, and the widthwise directionalong the other of the x-axis and y-axis direction, and where FMRspectra are obtained for two different orientations of a fixed magneticfield while sweeping through a range of microwave frequencies, or bysweeping the magnetic field through a range of values at a fixedmicrowave frequency. Ms is calculated from a difference in resonancefield or from a difference in resonance frequency for FMR measurementsinvolving the two different magnetic field orientations. The x-axis andy-axis directions are in the plane of the wafer under test (WUT), andthe z-axis is perpendicular to the plane of the magnetic film formed onthe WUT. The terms “RF” and “microwave” may be used interchangeably, and“controller” and “computer” may be used interchangeably.

In related U.S. patent application Ser. No. 15/463,074, we disclosed aFMR measurement system that relies on a waveguide transmission line(WGTL) that is attached to RF input and RF output connectors and iscapable of taking FMR measurements at a plurality of sites on a wholewafer to determine magnetic parameters including anisotropy fields (Hk),gyromagnetic ratio _(y), damping constant a, and inhomogeneousbroadening (L₀). Later, in U.S. patent application Ser. No. 15/875,004,we disclosed a modified FMR measurement system where a RF electricalprobe is formed on a mounting plate with a magnetic assembly to performFMR measurements. Then, in U.S. patent application Ser. No. 16/056,783,we disclosed how multiple RF probes and multiple magnetic field sourcesmay be formed on a mounting plate above a WUT in a fully automated FMRmeasurement system to perform either a plurality of FMR measurementsconsecutively or simultaneously at a plurality of predetermined sites ona WUT.

Here we disclose a method to determine Ms data in addition to Hk, γ, α,and L₀ for patterned magnetic films using one of the configurations forthe FMR apparatus described in the related patent applications. Itshould be understood that other systems enabling FMR characterization insmall coupons of patterned magnetic films could be used to determine Msby this method. Other metrology techniques such as Magneto Optical KerrEffect (MOKE) or Anomalous Hall Effect (AHE) may be used to measure Msof a patterned structure. However, the FMR measurement method disclosedherein is believed to provide more accurate data that is readilycalculated, and has the additional advantage of providing data thatenables other magnetic parameters besides Ms to be derived.

There are other methods of determining Ms that are based on measuringdemagnetizing fields as a function of lateral dimensions in nanopillarstructured magnetic devices such as “Material parameters ofperpendicularly magnetized tunnel junctions from spin torqueferromagnetic resonance techniques”, C. Safranski et al., Applied Phys.Letters 109, 132408 (2016). The idea of such approach is that processrelated damage, which relates to variations in lateral dimensions,interfacial properties, and/or morphology, from magnetic structure tomagnetic structure can lead to a dispersion of magnetic properties suchas Ms, Hk or even demagnetizing factors and therefore induce a sizedependence of such magnetic properties. However, the Ms measurementsbased on fitting this size dependence would be prone to many assumptionsand approximations and therefore to errors. The FMR measurement methoddisclosed herein only requires measuring magnetic stripes with a singlewidth and length along two different directions, which means the methodis essentially insensitive to edge damage since the edge effect willcancel out.

Referring to FIG. 1, a schematic drawing is shown with the keycomponents of a FMR measurement system that may be employed for the FMRmeasurement method of the present disclosure. There is a computer 11 tomanage the up movement 51 u or down movement 51 d of the prober stagealso known as wafer chuck 20, and WUT 22 on which the magnetic film 23to be tested is formed. The wafer chuck and WUT may be raised withrespect to the mounting plate so that each of the “m” RF probes 40 a-40m contacts or is proximate to a predetermined test location on the WUTwhere “m” is an integer ≥2. An electrical probe station may be employedto position the mounting plate above the WUT with respect to lateralmovement (x-axis and y-axis directions), and also to manage the verticalapproach to adjust contact or proximity to the WUT as directed by thecontroller. However, in another embodiment, the RF probes may beattached to a probe card.

The magnetic assembly 30 is comprised of at least one magnetic fieldsource, but may include a plurality of “k” magnetic poles (where k is aninteger 1≤k≤m) in some embodiments. In other embodiments, the magneticassembly may comprise one or more coils of superconducting wires so thatno magnetic poles are necessary. Computer 11 has a link 42 a to powergenerator 34 (or a plurality of power generators) that produces power toform magnetic flux in one or more magnetic poles or coils in themagnetic assembly. A magnetic field of up to 10 Tesla is appliedsimultaneously or consecutively to “m” different predetermined (x_(i),y_(i)) coordinates (test locations) on the WUT while a RF signal pathwayin each RF probe 40 a-40 m contacts or is within about 100 microns ofthe magnetic film top surface at each (x_(i), y_(i)) coordinate.

As indicated in each of the aforementioned related patent applications,the magnetic field may be applied perpendicular to the plane of the WUT,or in-plane. In the former case, a range of RF microwave frequenciesfrom 1 GHz to 100 GHz may be employed. With the in-plane magnetic fieldoption, the range of usable RF microwave frequencies is between 0.01 GHzto 100 GHz.

Controller 11 has an electrical connection 42 b to RF generator 48 thatprovides a RF input signal 42 s to one or more RF power distributiondevices 60 such as a broadband RF power divider, or one or morebroadband RF directional coupler devices. RF input signals may bedelivered to each of the RF probes by using RF power distributiondevices or RF power routing devices. Simultaneous application of amicrowave frequency (RF input signal) through a first signal pathway ina RF probe, and an applied magnetic field (H) of up to 10 Tesla from amagnetic pole induces a FMR condition (RF power absorbance) in themagnetic film proximate to each (x_(i), y_(i)) coordinate on the WUT.Each FMR measurement comprises sweeping a range of microwave frequencieswhile applying a fixed H, or sweeping through a range of H values at afixed microwave frequency.

In one preferred embodiment, the RF output signal from each RF probe 40a-40 m is detected by one of the RF diodes 44 a-44 m, which collects aRF output signal transmitted from the magnetic film and that exits eachRF probe through a second signal pathway in a transmission mode orthrough the first signal pathway in a reflectance mode. Each RF outputsignal corresponds to a RF power loss caused by the FMR condition wherea certain amount of microwave power is absorbed and excites the magneticfilm to a resonance state. Each FMR measurement at a (x_(i), y_(i))coordinate may comprise a plurality of RF input signals eachcorresponding to a different RF frequency.

In one preferred operating mode for a FMR measurement, the appliedmagnetic field is varied (swept from a minimum to a maximum value) at aconstant microwave frequency. The FMR measurement is preferably repeatedby sweeping the magnetic field successively through each of a pluralityof different microwave frequencies. In one embodiment, each RF diode 44a-44 m converts the power output from one of the plurality of “m” RFprobes 40 a-40 m to a voltage signal that is transmitted to a DataAcquisition (DAQ) system 10. This DAQ system digitizes the voltageoutput signals from each RF probe, allowing them to be processed by thecontroller 11. Thereafter, the controller 11 calculates one or more ofH_(k), α, γ, inhomogeneous broadening (L₀), and Ms based on each pair ofapplied magnetic field value and applied microwave frequency used toestablish a FMR condition, and on voltage output data from each RFdiode.

Referring to FIG. 2, one FMR measurement method of the presentdisclosure comprises forming a first set of stripes 23 a and a secondset of stripes 23 b in a magnetic film on WUT 22 where each stripe hasan asymmetrical shape with a widthwise dimension unequal to a lengthwisedimension. In the exemplary embodiment, stripes 23 a have asubstantially rectangular shape with length L₁ in the y-axis direction,and width w₁ in the x-axis direction. In alternative embodiments (notshown), the stripes may have a substantially elliptical or anotherelongated shape. The stripes are typically formed by a conventionalphotolithography technique where a photoresist film is coated on themagnetic film, patternwise exposed, and then developed to form openingsbetween the desired stripe shapes. Then, a reactive ion etch (RIE) orion beam etch (IBE) removes portions of magnetic film that are notprotected by the remaining photoresist layer thereby transferring thepattern through the magnetic film. There is also a second set of stripes23 b in the magnetic film where each of the substantially rectangularshapes has a length L₂ in the x-axis direction and width w₂ in they-axis direction. In a preferred embodiment, w₁=w₂, and L₁=L₂, andL₁>w₁. L₁ and L₂ are preferably greater than 50 nm, and have a maximumvalue proximate to a diameter of the WUT. The thickness “t” (not shown)of the magnetic film is preferably from 5 Angstroms to 50 Angstroms and<w₁, but has a minimum value of 1 Angstrom and a maximum value of around2 microns. Both sets of stripes are “patterned” simultaneously using theaforementioned photolithography and etching sequence. The photoresist isremoved with a conventional method after the IBE or RIE.

The number of stripes may be adjusted depending on the configuration ofthe FMR measurement system in order to ensure an appropriatesignal-to-noise ratio (SNR). A maximum RF output signal is obtained whenthe magnetic film stripe has a width that is greater than or equal to alargest side in the cross-sectional area (footprint) of the RF probeused to characterize the magnetic film at predetermined locations. TheRF probe may be a RF electrical probe or optionally a WGTL, or RF probeend, a grounded coplanar waveguide (GCPWG), coplanar waveguide (CPWG),co-axial waveguide (CWG), stripline (SL), a microstrip (MS) or any otherwaveguide transmission line (WGTL) that is used to transmit and detectRF signals.

In one preferred embodiment, a magnetic field (H) is applied in a fixeddirection (parallel to the x-axis or y-axis) with respect to the WUT.The dimensions of the stripes determine the values of the demagnetizingfactors Nx, Ny, and Nz according to “Demagnetizing factors forrectangular ferromagnetic prisms”, A. Aharoni, J. Applied Physics 83,432 (1998). Thus, the relationship Nz>Ny>Nx is implied when L₁>w₁>t asin the first set of stripes 23 a, and when L₂>w₂>t as in the second setof stripes 23 b. The demagnetizing components Dx, Dy, and Dz are relatedto the demagnetizing factors according to the following equations: Dx=4πMs×Nx; Dy=4 πMs×Ny, and Dz=4 πMs×Nz where (Nx+Ny+Nz)=1.

The FMR measurement method of the present disclosure is based on theapplication of two different magnetic field orientations to at least oneset of “h” stripes where h is an integer ≥1. According to a firstembodiment shown in FIG. 2, an in-plane field H is oriented parallel toL₂ (to the long axis of stripes 23 b), and H is simultaneously orientedtransverse to L₁ (to the long axis of stripes 23 a). In other words, theFMR measurements may be performed with only one in-plane applied fielddirection when two sets of stripes 23 a, 23 b are formed on the WUT 22,and one set of stripes has a long axis aligned orthogonal to the longaxis of the other set. At least one RF probe is necessary to provide RFinput signals and receive RF output signals from stripes 23 a, and atleast one RF probe is needed to provide RF input signals and receive RFoutput signals from stripes 23 b when H is applied. The presentdisclosure anticipates there may be a minimum of one stripe 23 a, andone stripe 23 b depending on the size of L₁, L₂, w₁, and w₂. The FMRmeasurement system that may be used to provide the required in-planefield has been described in related U.S. patent application Ser. No.15/875,004, and preferably comprises a reflectance mode for microwavesignal transmission.

In a second embodiment depicted in FIG. 3A-3B, only one set of stripes23 a is formed on WUT 22. A first in-plane field (H₁) is appliedparallel to the long axis (y-axis) of stripes 23 a in FIG. 3A, and thena second in-plane field (H₂) is applied transverse to the long axis inFIG. 3B according to the FMR measurement method disclosed herein.Alternatively, H₂ is applied first and then H₁ is applied in a secondstep. Dimensions L₁ and w₁ are retained from the first embodiment. Insome embodiments, the wafer chuck 20 and WUT (FIG. 1) may be rotated 90degrees between application of H₁ and application of H₂. In analternative embodiment, the mounting plate with the magnetic assemblyand RF probes is rotated 90 degrees while the WUT is maintained in aconstant position. Thus, a microwave frequency (f) is applied to atleast one location on at least one elongated stripe to induce aferromagnetic resonance condition therein for each pair of H₁ and fvalues, and for each pair of H₂ and f values, wherein a fixed H₁ andfixed H₂ that is greater than the perpendicular anisotropy field(Hk_(eff)) is applied while sweeping through a range of microwavefrequencies, or a fixed frequency is applied while sweeping through arange of H₁ and H₂ values.

In both system configurations (FIG. 2 and FIGS. 3A-3B), the in-planemagnetic field is applied either parallel or transverse to the long axisof stripes. If FMR experiments are carried out by sweeping the magneticfield (H) at different microwave frequencies (f1, . . . , fn), aresonance field difference (ΔHr) between both in-plane magnetic fieldorientations is obtained at a fixed microwave frequency (f1, f2, . . .or fn) where ΔHr=Hry−Hrx; and where Hrx is the observed resonance fieldfor in-plane magnetic fields parallel to the long axis, and Hry is theobserved resonance field for in-plane magnetic fields transverse to thelong axis. Note that ΔHr relies on a non-negligible Ny or Nxdemagnetizing factor due to the large asymmetric lateral dimensions ofsuch magnetic stripes (or any other elongated patterned magneticstructure). Thus, the contribution to the FMR conditions of suchnon-negligible term will be different depending on the magnetic fieldorientation. Alternatively, if FMR experiments are carried out bysweeping the microwave frequencies (f) at different in-plane magneticfield amplitudes (H1, H2, . . . , Hn), a resonance frequency difference(Δfr) between both in-plane magnetic field orientations is obtained at afixed magnetic field amplitude (H1, H2, . . . or Hn) where Δfr=fry−frx;and where frx is the observed resonance frequency for in-plane magneticfields parallel to the long axis, and fry is the observed resonancefrequency for in-plane magnetic fields transverse to the long axis.

In yet another embodiment depicted in FIGS. 4A-4B that represents amodification of the second embodiment, the first magnetic field (H₁) maybe oriented in-plane (i.e. parallel to the long axis direction) as shownin FIG. 4A, and the second magnetic field (H₂) depicted in FIG. 4B isapplied perpendicular to the plane of the WUT 22 so that two differentmagnetic field orientations are applied to the magnetic film stripes 23a during two different time periods. In either case, the secondorientation is orthogonal to the first orientation. The FMR measurementsystem that may be employed to provide the requiredperpendicular-to-plane field was previously described in related U.S.patent application Ser. No. 15/875,004, and may use either atransmission mode or reflectance mode for transmitting microwave signalsto and from the magnetic film or magnetic structure.

In all of the aforementioned embodiments, an applied magnetic field Hlarger than the effective anisotropy field H_(keff) is considered:H>H_(keff) where Hk_(eff)=2 K_(eff)/Ms=2(K_(i)/t−2 πMs² Nz)/Ms), K_(eff)is the effective anisotropy, and K_(i) is the interfacial anisotropy.Accordingly, the resonance field conditions are given by:

$\begin{matrix}{f_{rx} = {\frac{\gamma}{2\; \pi} \cdot \sqrt{\begin{matrix}{\left\lbrack {H - \left( {H_{keff} + {4\pi \; {{Ms} \cdot {Nx}}}} \right) + {{H_{u} \cdot \cos^{2}}\varphi}} \right\rbrack \cdot} \\\left\lbrack {H - {4\pi \; {{Ms}\left( {{Nx} - {Ny}} \right)}} + {{H_{u} \cdot \cos}\; 2\varphi}} \right\rbrack\end{matrix}}}} & \left( {{Eq}.\mspace{14mu} 1} \right) \\{{{{for}\mspace{14mu} H} > {H_{keff}\mspace{14mu} {along}\mspace{14mu} {the}\mspace{14mu} x\text{-}{axis}}};} & \; \\{f_{ry} = {\frac{\gamma}{2\; \pi} \cdot \sqrt{\begin{matrix}{\left\lbrack {H - \left( {H_{keff} + {4\pi \; {{Ms} \cdot {Ny}}}} \right) + {{H_{u} \cdot \sin^{2}}\varphi}} \right\rbrack \cdot} \\\left\lbrack {H - {4\pi \; {{Ms}\left( {{Ny} - {Nx}} \right)}} - {{H_{u} \cdot \cos}\; 2\varphi}} \right\rbrack\end{matrix}}}} & \left( {{Eq}.\mspace{14mu} 2} \right) \\{{{{for}\mspace{14mu} H} > {H_{keff}\mspace{14mu} {along}\mspace{14mu} {the}\mspace{14mu} y\text{-}{axis}}};{and}} & \; \\{f_{rz} = {\frac{\gamma}{2\; \pi} \cdot \sqrt{\begin{matrix}{\left\lbrack {\left( {H + H_{keff}} \right) + {4\pi \; {{Ms} \cdot {Nx}}} - {{H_{u} \cdot \cos^{2}}\varphi}} \right\rbrack \cdot} \\{\left\lbrack {\left( {H + H_{keff}} \right) + {4\pi \; {{Ms} \cdot {Ny}}} - {{H_{u} \cdot \sin^{2}}\varphi}} \right\rbrack - {{H_{u}^{2} \cdot \sin^{2}}{\varphi \cdot \cos^{2}}\varphi}}\end{matrix}}}} & \left( {{Eq}.\mspace{14mu} 3} \right) \\{{for}\mspace{14mu} H\mspace{14mu} {along}\mspace{14mu} {the}\mspace{14mu} z\text{-}{axis}} & \;\end{matrix}$

where H_(u)=2 K_(u)/Ms and Ku is the in-plane uniaxial anisotropy atangle ϕ with respect to the x-axis, and H_(keff) is the effectiveanisotropy field.

If Nx˜0 (e.g. for L>10 μm in FIGS. 3A-3B), Equations 1-3 can besimplified:

$\begin{matrix}{f_{rx} = {\frac{\gamma}{2\; \pi} \cdot \sqrt{\left\lbrack {H - H_{keff} + {{H_{u} \cdot \cos^{2}}\varphi}} \right\rbrack \cdot \left\lbrack {H + {4\pi \; {{Ms} \cdot {Ny}}} + {{H_{u} \cdot \cos}\; 2\varphi}} \right\rbrack}}} & \left( {{Eq}.\mspace{14mu} 4} \right) \\{{{{for}\mspace{14mu} H} > {H_{keff}\mspace{14mu} {along}\mspace{14mu} {the}\mspace{14mu} x\text{-}{axis}}};} & \; \\{f_{ry} = {\frac{\gamma}{2\; \pi} \cdot \sqrt{\begin{matrix}{\left\lbrack {H - \left( {H_{keff} + {4\pi \; {{Ms} \cdot {Ny}}}} \right) + {{H_{u} \cdot \sin^{2}}\varphi}} \right\rbrack \cdot} \\\left\lbrack {H - \left( {{4\pi \; {{Ms} \cdot {Ny}}} + {{H_{u} \cdot \cos}\; 2\varphi}} \right)} \right\rbrack\end{matrix}}}} & \left( {{Eq}.\mspace{14mu} 5} \right) \\{{{{for}\mspace{14mu} H} > {H_{keff}\mspace{14mu} {along}\mspace{14mu} {the}\mspace{14mu} y\text{-}{axis}}};{and}} & \; \\{f_{rz} = {\frac{\gamma}{2\; \pi} \cdot \sqrt{\begin{matrix}{\left( {H + H_{keff} - {{H_{u} \cdot \cos^{2}}\varphi}} \right\rbrack \cdot} \\{\left\lbrack {\left( {H + H_{keff}} \right) + {4\pi \; {{Ms} \cdot {Ny}}} - {{H_{u} \cdot \sin^{2}}\varphi}} \right\rbrack - {{H_{u}^{2} \cdot \sin^{2}}{\varphi \cdot \cos^{2}}\varphi}}\end{matrix}}}} & \left( {{Eq}.\mspace{14mu} 6} \right) \\{{for}\mspace{14mu} H\mspace{14mu} {along}\mspace{14mu} {the}\mspace{14mu} z\text{-}{{axis}.}} & \;\end{matrix}$

When the magnetic field direction is fixed with respect to the wafer andFMR is measured for elongated structures with the long axis parallel andtransverse to the magnetic field orientation (FIG. 2), then theresonance frequency shift Δfr=f_(ry)−f_(rx) and the resonance fieldshift ΔH_(r)≡H_(ry)−H_(rx) between the two in-plane configurations willfollow the following expressions:

$\begin{matrix}{{{\Delta \; {fr}^{2}} + {2\; \Delta \; {{fr} \cdot f_{rx}}}} = {\left( \frac{\gamma}{2\; \pi} \right)^{2} \cdot {Dy} \cdot \left( {{2Q_{1}} + Q_{2} - {Dy}} \right)}} & \left( {{Eq}.\mspace{14mu} 7} \right) \\{{{\Delta \; H_{r}^{2}} + {\Delta \; {H_{r} \cdot \left( {Q_{1} + Q_{2} - {2{Dy}}} \right)}}} = {{Dy} \cdot \left( {{2Q_{1}} + Q_{2} - {Dy}} \right)}} & \left( {{Eq}.\mspace{14mu} 8} \right) \\{{where}\text{:}} & \; \\{Q_{1} = {H - H_{keff} + {{H_{u} \cdot \cos^{2}}\varphi}}} & \; \\{Q_{2} = {H + {{H_{u} \cdot \cos}\; 2\; \varphi}}} & \; \\{{Dy} = {4\pi \; {{Ms} \cdot {Ny}}}} & \; \\{f_{rx} = {\frac{\gamma}{2\; \pi} \cdot \sqrt{Q_{1} \cdot \left\lbrack {Q_{2} + {Dy}} \right\rbrack}}} & \;\end{matrix}$

These expressions for Q₁, Q₂, Dy, f_(rx) imply that:

$\begin{matrix}{{\Delta \; {fr}} = {f_{rx} \cdot \left\lbrack {{- 1} \pm \sqrt{1 + \frac{{Dy} \cdot \left( {{2\; Q_{1}} + Q_{2} - {Dy}} \right)}{Q_{1} \cdot \left\lbrack {Q_{2} + {Dy}} \right\rbrack}}} \right\rbrack}} & \left( {{Eq}.\mspace{14mu} 9} \right) \\{{\Delta \; H_{r}} = {{- \frac{\left\lbrack {Q_{1} + Q_{2} - {2{Dy}}} \right\rbrack}{2}} \cdot \left\lbrack {1 \mp \sqrt{1 + \frac{4 \cdot {Dy} \cdot \left( {{2\; Q_{1}} + Q_{2} - {Dy}} \right)}{\left\lbrack {Q_{1} + Q_{2} - {Dy}} \right\rbrack^{2}}}} \right\rbrack}} & \left( {{Eq}.\mspace{14mu} 10} \right)\end{matrix}$

For sufficient high magnetic fields (H>>H_(keff), H_(u) or Dy), both Δfrand ΔH_(r) are directly proportional to Ms, and the proportionalityfactor depends only on the geometric factor Ny:

$\begin{matrix}{{\Delta \; {fr}} \sim {{\left( \frac{\gamma}{2\; \pi} \right) \cdot 6}\; \pi \; {{Ms} \cdot {Ny}}}} & \left( {{Eq}.\mspace{14mu} 11} \right) \\{{\Delta \; H_{r}} \sim {6\; \pi \; {{Ms} \cdot {Ny}}}} & \left( {{Eq}.\mspace{14mu} 12} \right)\end{matrix}$

Note that Equations 11 & 12 show that measurements of Ms in the firstembodiment (FIG. 2) are not influenced by a possible in-plane uniaxialanisotropy. By contrast, measurements of the same set of stripes withtwo orientations of the magnetic field (FIGS. 3A-3B or FIGS. 4A-4B)would be sensitive to an in-plane anisotropy.

A first set of equations (Equations 7, 9 and 11), or a second set ofequations (Equations 8, 10 and 12) are used when FMR experiments arecarried out by sweeping the microwave frequency excitation at fixedexternal magnetic field amplitude, or by sweeping the external magneticfield amplitude at fixed microwave excitations, respectively. In eithercase, note that the FMR measurement from a first RF probe on a stripe 23a in FIG. 2 is inputted into equation 4 while a similar input from RFprobe on a stripe 23 b is used in equation 5 to determine Mr in equation7 (or ΔHr in equation 8) for each pair of applied field (H) andfrequency (f) that induces FMR resonance in the magnetic film stripes.Note that when no in-plane uniaxial anisotropy is present (Ku and Hu=0),the same ΔHr and Mr are obtained from the first and second embodiments(FIG. 2 and FIGS. 3A-3B).

FIG. 8 shows an example of ΔHr as a function of stripe width w₁ for alength L=10 μm, and thickness t=0.9 nm, Ms˜1300 emu/cc, and aninterfacial anisotropy Ki˜1.45 erg/cm², and using an applied in-planefield (H) of 40 kOe. Note for such typical values, ΔHr is larger than100 Oe when w is smaller than 400 nm.

Equations 1-6 may also be used to calculate Ms from resonance conditionsalong various orientations of the applied field following the samemethod as described above.

FIG. 5A, FIG. 5B, and FIG. 5C show Nx, Ny, and Nz, respectively, as afunction of stripe length for different values of stripe width and athickness of 1 nm according to “Demagnetizing factors for rectangularferromagnetic prisms”, A. Aharoni, J. Applied Physics 83, 432 (1998). Onthe other hand, FIG. 6A, FIG. 6B, and FIG. 6C show Nx, Ny, and Nz,respectively at various thicknesses as a function of stripe width for a10 micron long magnetic stripe. Note that in both configurations, Nz isgreater than Ny since stripe width is considerably larger than thethickness (1 nm, 2 nm, and 5 nm) and Nx is proximate to 0.

In FIG. 7A, resonance frequency (f) is plotted as a function of theapplied field (H) following equations (Eq. 1 and Eq. 2) for magneticstripes of length=10 microns, width=100 nm, and thickness=1 nm when H isparallel (curve 80) and transverse (curve 81) to the long axis of thestriped pattern as in FIG. 2. In this example, no uniaxial anisotropy isconsidered (Ku=0), Hk_(eff)=7.4 kOe, and Ms=1000 emu/cc. With regard toFIG. 7B, the difference between the FMR resonance fields for the twoin-plane configurations from FIG. 7A (ΔHr=Hry−Hrx) is plotted vs.applied field. The preferred operating region is proximate to the rightend of curve 82 where curve 82 approaches dashed line 83 that shows thelimit value for ΔHr=6 πMs×Ny for high magnetic fields. It should beunderstood that as the ratio L/w increases, then ΔHr becomes larger.

FIG. 9 depicts a typical data set. In this example, transmitted RF poweris measured for five different frequencies as a function of the appliedmagnetic field on an uncut 8-inch diameter wafer (WUT). Curves 60, 61,62, 63, and 64 are generated with RF frequencies of 20 GHz, 25 GHz, 30GHz, 35 GHz, and 40 GHz, respectively, and sweeping the magnetic fieldbetween −1.0 Tesla and 1.0 Tesla (10000 Oe) according to a scanning FMRmeasurement method described in related U.S. patent application Ser. No.15/875,004. A FMR measurement at each (x_(i), y_(i)) coordinate on themagnetic film stripes requires about two minutes of process time.Therefore, total FMR measurement time for the entire wafer depends onthe desired number of (x_(i), y_(i)) coordinates to be included whendetermining Ms, and Hk, γ, α, and L₀, if desired. It should beunderstood that the FMR measurement method disclosed herein may beperformed on pieces of a wafer (coupons). However, as indicated earlier,the benefits of using a whole wafer are significant in terms of cost andconvenience meaning that subjecting a coupon to the disclosed method isonly done in special circumstances as in failure analysis.

While this disclosure has been particularly shown and described withreference to the preferred embodiment thereof, it will be understood bythose skilled in the art that various changes in form and details may bemade without departing from the spirit and scope of this disclosure.

We claim:
 1. A ferromagnetic resonance (FMR) measurement method fordetermining saturation magnetization (Ms) in a magnetic film, or in amultilayer structure with at least one magnetic layer that is formed ona wafer, comprising: (a) forming a pattern in the magnetic film ormultilayer structure comprised of at least a first elongated(asymmetrical) structure with a first length (L_(i)) along a y-axisdirection, and a first width (w_(i)) along a x-axis direction; and atleast a second elongated structure with a second length (L₂) along thex-axis direction, and a second width (w₂) along the y-axis directionwhere L₁>w_(i) and L₂>w₂; (b) applying a magnetic field (H) beingsimultaneously either parallel to the first elongated structure andtransverse to the second elongated structure or transverse to the firstelongated structure and parallel to the second elongated structure whileapplying a microwave (RF) frequency to one or more locations on each ofthe first and second elongated structures to induce a ferromagneticresonance (FMR) condition therein at the one or more locations, whereina fixed H is applied while sweeping through a range of microwavefrequencies, or a fixed frequency is applied while sweeping through arange of H amplitudes; (c) determining a resonance field difference(ΔHr) from a resonance field (Hrx) measured at the one or more locationson the first elongated structure, and a resonance field (Hry) measuredat the one or more locations on the second elongated structure, ordetermining a resonance frequency difference (Δfr) from a resonancefrequency (frx) at the one or more locations on the first elongatedstructure, and a resonance frequency (fry) at the one or more locationson the second elongated structure; and (d) calculating Ms from ΔHr orΔfr.
 2. The FMR measurement method of claim 1 wherein Ms is calculatedwith the following equations comprised of demagnetizing factors Nx, Ny,and Nz: $\begin{matrix}{f_{rx} = {\frac{\gamma}{2\; \pi} \cdot \sqrt{\begin{matrix}{\left\lbrack {H - \left( {H_{keff} + {4\pi \; {{Ms} \cdot {Nx}}}} \right) + {{H_{u} \cdot \cos^{2}}\varphi}} \right\rbrack \cdot} \\\left\lbrack {H - {4\pi \; {{Ms}\left( {{Nx} - {Ny}} \right)}} + {{H_{u} \cdot \cos}\; 2\varphi}} \right\rbrack\end{matrix}}}} & (1) \\{{{for}\mspace{14mu} H\mspace{14mu} {along}\mspace{14mu} {the}\mspace{14mu} x\text{-}{axis}\mspace{14mu} {direction}};{and}} & \; \\{f_{ry} = {\frac{\gamma}{2\; \pi} \cdot \sqrt{\begin{matrix}{\left\lbrack {H - \left( {H_{keff} + {4\pi \; {{Ms} \cdot {Ny}}}} \right) + {{H_{u} \cdot \sin^{2}}\varphi}} \right\rbrack \cdot} \\\left\lbrack {H - {4\pi \; {{Ms}\left( {{Ny} - {Nx}} \right)}} - {{H_{u} \cdot \cos}\; 2\varphi}} \right\rbrack\end{matrix}}}} & (2)\end{matrix}$ for H along the y-axis direction where H_(u)=2 Ku/Ms andKu is a uniaxial anisotropy at angle ϕ with respect to the x-axis, γ isa gyromagnetic ratio for the magnetic film or magnetic structure,H_(keff) is the effective anisotropy field H_(keff)=2K_(eff)/Ms=2(K_(i)/t−2 πMs² Nz)/Ms), K_(eff) is the effectiveanisotropy, and K_(i) is the interfacial anisotropy.
 3. The FMRmeasurement method of claim 1 wherein L₁=L₂ and w₁=w₂.
 4. The FMRmeasurement method of claim 2 wherein L₁ and L₂ are each >1 micron sothat Nx is essentially 0, and equations (1) and (2) are simplified toequations (3) and (4), respectively, that are the following:$\begin{matrix}{{f_{rx} = {\frac{\gamma}{2\; \pi} \cdot \sqrt{\left\lbrack {H - H_{keff} + {{H_{u} \cdot \cos^{2}}\varphi}} \right\rbrack \cdot \left\lbrack {H + {4\pi \; {{Ms} \cdot {Ny}}} + {{H_{u} \cdot \cos}\; 2\varphi}} \right\rbrack}}};} & (3) \\{and} & \; \\{f_{ry} = {\frac{\gamma}{2\; \pi} \cdot \sqrt{\begin{matrix}{\left\lbrack {H - \left( {H_{keff} + {4\pi \; {{Ms} \cdot {Ny}}}} \right) + {{H_{u} \cdot \sin^{2}}\varphi}} \right\rbrack \cdot} \\\left\lbrack {H - \left( {{4\pi \; {{Ms} \cdot {Ny}}} + {{H_{u} \cdot \cos}\; 2\varphi}} \right)} \right\rbrack\end{matrix}}}} & (4)\end{matrix}$ and wherein the fixed H is applied while sweeping throughthe range of microwave frequencies, and the (Δfr), which is equal to(fry−frx), is related to the following expressions:${{{\Delta \; {fr}^{2}} + {2\; \Delta \; {{fr} \cdot f_{rx}}}} = {\left( \frac{\gamma}{2\; \pi} \right)^{2} \cdot {Dy} \cdot \left( {{2Q_{1}} + Q_{2} - {Dy}} \right)}};$where  Q₁ = H − H_(keff) + H_(u) ⋅ cos²φ, and  Q₂ = H + H_(u) ⋅ cos  2φ; and  a${{{demagnetizing}\mspace{14mu} {component}\mspace{14mu} {Dy}} = {4\; \pi \; {{Ms} \cdot {Ny}}}},{{{and}\mspace{14mu} f_{rx}} = {\frac{\gamma}{2\; \pi} \cdot \sqrt{Q_{1} \cdot \left\lbrack {Q_{2} + {Dy}} \right\rbrack}}}$thereby implying the following equation:${\Delta \; {fr}} = {f_{rx} \cdot {\left\lbrack {{- 1} \pm \sqrt{1 + \frac{{Dy} \cdot \left( {{2Q_{1}} + Q_{2} - {Dy}} \right)}{Q_{1} \cdot \left\lbrack {Q_{2} + {Dy}} \right\rbrack}}} \right\rbrack.}}$5. The FMR measurement method of claim 4 wherein H is greater thanH_(keff), H_(u), and Dy such that Δfr is proximate to${\left( \frac{\gamma}{2\; \pi} \right) \cdot 6}\; \pi \; {{Ms} \cdot {{Ny}.}}$6. The FMR measurement method of claim 2 wherein L₁ and L₂ are each >1micron so that Nx is essentially 0, and equations (1) and (2) aresimplified to equations (3) and (4), respectively, that are thefollowing: $\begin{matrix}{{f_{rx} = {\frac{\gamma}{2\; \pi} \cdot \sqrt{\left\lbrack {H - H_{keff} + {{H_{u} \cdot \cos^{2}}\varphi}} \right\rbrack \cdot \left\lbrack {H + {4\pi \; {{Ms} \cdot {Ny}}} + {{H_{u} \cdot \cos}\; 2\varphi}} \right\rbrack}}};} & (3) \\{and} & \; \\{f_{ry} = {\frac{\gamma}{2\; \pi} \cdot \sqrt{\begin{matrix}{\left\lbrack {H - \left( {H_{keff} + {4\pi \; {{Ms} \cdot {Ny}}}} \right) + {{H_{u} \cdot \sin^{2}}\varphi}} \right\rbrack \cdot} \\\left\lbrack {H - \left( {{4\pi \; {{Ms} \cdot {Ny}}} + {{H_{u} \cdot \cos}\; 2\varphi}} \right)} \right\rbrack\end{matrix}}}} & (4)\end{matrix}$ and wherein the fixed frequency is applied while sweepingthrough the range of H, and ΔHr, which is equal to (Hry−Hrx), is relatedto the following expressions:Δ H_(r)² + Δ H_(r) ⋅ (Q₁ + Q₂ − 2Dy) = Dy ⋅ (2 Q₁ + Q₂ − Dy);where  Q₁ = H − H_(keff) + H_(u) ⋅ cos²φ, and  Q₂ = H + H_(u) ⋅ cos  2φ; and  a${{{demagnetizing}\mspace{14mu} {component}\mspace{14mu} {Dy}} = {4\; \pi \; {{Ms} \cdot {Ny}}}},{{{and}\mspace{14mu} f_{rx}} = {\frac{\gamma}{2\; \pi} \cdot \sqrt{Q_{1} \cdot \left\lbrack {Q_{2} + {Dy}} \right\rbrack}}}$thereby implying the following equation:${\Delta \; H_{r}} = {{- \frac{\left\lbrack {Q_{1} + Q_{2} - {2{Dy}}} \right\rbrack}{2}} \cdot {\left\lbrack {1 \mp \sqrt{1 + \frac{4 \cdot {Dy} \cdot \left( {{2\; Q_{1}} + Q_{2} - {Dy}} \right)}{\left\lbrack {Q_{1} + Q_{2} - {2{Dy}}} \right\rbrack^{2}}}} \right\rbrack.}}$7. The FMR measurement method of claim 6 wherein H is greater thanH_(keff), H_(u), and Dy such that ΔHr is proximate to 6 πMs·Ny.
 8. TheFMR measurement method of claim 1 wherein a thickness of the magneticfilm or multilayer structure is less than w₁ in the first elongatedstructure, and is less than w₂ in the second elongated structure.
 9. TheFMR measurement method of claim 1 wherein the applied magnetic field (H)is up to 10 Tesla.
 10. The FMR measurement method of claim 1 wherein theapplied microwave frequency enters the magnetic film through a first RFsignal pathway, and exits the magnetic film or magnetic structurethrough the first RF signal pathway in a reflectance mode.
 11. The FMRmeasurement method of claim 10 wherein the applied microwave frequencyis in a range of 0.01 GHz to 100 GHz.
 12. The FMR measurement method ofclaim 1 wherein w₁ and w₂ are greater than or equal to a largest side ina footprint of a RF probe end, waveguide transmission line (WGTL), oranother device that is used to transmit microwave frequencies to andfrom the magnetic film or magnetic structure.
 13. The FMR measurementmethod of claim 1 wherein the FMR condition is induced by a fullyautomated wafer level FMR apparatus thereby enabling Ms to be determinedon a whole wafer without cutting the whole wafer into coupons.
 14. TheFMR measurement method of claim 1 wherein the FMR condition is inducedin a piece of a wafer.
 15. The FMR measurement method of claim 1 whereinthe first and second elongated structures have a substantiallyrectangular, or substantially elliptical shape.
 16. The FMR measurementmethod of claim 1 wherein at least a first RF probe is employed toprovide RF input signals and receive RF output signals from the firstelongated structure, and at least a second RF probe is needed to provideRF input signals and receive RF output signals from the second elongatedstructure.
 17. The FMR measurement method of claim 1 wherein ΔHr becomeslarger as a ratio L₁/w₁ and a ratio L₂/w₂ increases.
 18. The FMRmeasurement method of claim 16 wherein each of the at least first andsecond RF probes is a RF electrical probe, a waveguide transmission line(WGTL), a RF probe end, a coplanar waveguide (CPWG), a grounded CPWG(GCPWG), a co-axial waveguide (CWG), a stripline (SL), or a microstrip(MS).
 19. The FMR measurement method of claim 1 wherein the magneticfield is applied by one or more magnetic poles, or one or more coils ofsuperconducting wires.
 20. The FMR measurement method of claim 16wherein each of the at least first and second RF probes contact or arewithin about 100 microns of the first and second elongated structures,respectively, when providing the RF input signals and receiving the RFoutput signals.